KOKUSAI Electric Group’s batch deposition and single-wafer treatment equipment is highly regarded by semiconductor device manufacturers around the globe and enjoys a world-leading market share.
KOKUSAI Electric Group, a global leader in batch deposition equipment and single-wafer treatment technology, continues to revolutionize the semiconductor industry. Renowned for its sophisticated batch ALD (Atomic Layer Deposition) technology, KOKUSAI Electric Group is addressing the critical challenges faced by semiconductor manufacturers worldwide.
Semiconductors, integral to numerous industries and everyday life, have undergone a significant evolution over the past seven decades. At the forefront of this evolution stands KOKUSAI Electric Group, leveraging its extensive semiconductor expertise since becoming an independent specialty manufacturer of semiconductor manufacturing equipment in 2018.
Focusing primarily on the deposition process, crucial for semiconductor performance, KOKUSAI Electric Group’s recent listing on the Tokyo Stock Exchange Prime Market in October 2023 reflects its anticipation of future growth. With semiconductor structures becoming more complex and three-dimensional, productivity challenges in the deposition process have intensified.
Indeed, today decreasing productivity and increasing difficulty in the deposition process are the most important issues for semiconductor devicemanufacturers.Thewafersurfacehasbecomemorecomplicatedin shape,whereanenormousnumberof narrow and deep holes and grooves are formed. This expands the surface area requiring deposition. In addition, the travel distance of gas required for deposition has become longer, increasingthetimerequiredfordeposition. This reduces productivity and increases the necessity of deposition with a high degree of difficulty.
KOKUSAI Electric Group addresses these challenges with its strengths in batch ALD technology and treatmenttechnology.BatchALDtechnol-ogy enables high-quality thin-film deposition with excellent step coverage and productivity, making it a logical solution for semiconductor evolution.Recognizedforitsprowess, KOKUSAIElectricGroup’sbatchALD technology is highly sought after in fields like 3D NAND manufacturing.
Moreover, the company’s treatment technology offers superior isotropy and step coverage, enhancing film properties across vari
